Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Osaka Taito and Hirano Takashi and Yabashi Makina and Sano Yasuhisa and Tono Kensuke and Inubushi Yuichi and Sato Takahiro and Ogawa Kanade and Matsuyama Satoshi and Ishikawa Tetsuya and Yamauchi Kazuto,大気圧プラズマによるチャネルカット単結晶シリコンの内壁エッチングの検討,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2013,2013A,0,653-654,https://cir.nii.ac.jp/crid/1390001205654655872,https://doi.org/10.11522/pscjspe.2013a.0.653.0