Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Hirose Tomohiro and Kami Yoshihiro and Yabuya Makoto,Development of high precision on-machine measurement unit for ultra-precision machine tool,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2013,2013A,0,29-30,https://cir.nii.ac.jp/crid/1390001205654751744,https://doi.org/10.11522/pscjspe.2013a.0.29.0