Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Idei Yoshikazu and Kimura Keiichi and Suzuki Keisuke and Khajornrungruang Panart,Study on fine particle behavior in SiO<sub>2</sub> film CMP using evanescent field,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2011,2011A,0,165-166,https://cir.nii.ac.jp/crid/1390001205655552000,https://doi.org/10.11522/pscjspe.2011a.0.165.0