Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Asai Makoto,A new design of semiconductor Process/Device simulation and It's Effects to Production Flow,Proceedings of the Conference of Transdisciplinary Federation of Science and Technology,,Transdisciplinary Federation of Science and Technology,2007,2007,0,92-92,https://cir.nii.ac.jp/crid/1390001205667036544,https://doi.org/10.11487/oukan.2007.0.92.0