Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) HONDA Nao and KANG Piljoong and ESASHI Masayoshi and TANAKA Shuji,OS1-07 Microimpeller Using Ultrathick Photoresist and Its Application to a Miniature Air Pump,The Proceedings of the National Symposium on Power and Energy Systems,2424-2950,The Japan Society of Mechanical Engineers,2005,2005.10,0,23-26,https://cir.nii.ac.jp/crid/1390001205886435712,https://doi.org/10.1299/jsmepes.2005.10.23