Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) 沢田 雅,Performance of a Turbomolecular Pump in the Transition and Slip Flow Regime,Journal of the Society of Mechanical Engineers,03875016,The Japan Society of Mechanical Engineers,1979,82,723,207,https://cir.nii.ac.jp/crid/1390001205926119040,https://doi.org/10.1299/jsmemag.82.723_207_9