著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Schroer Erwin and Uematsu Masashi,Simulatioin of Clustering and Pile-Up during Post-Implantation Annealing of Phosphorus in Silicon,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1999,38,1A,7-11,https://cir.nii.ac.jp/crid/1390001206249357056,https://doi.org/10.1143/jjap.38.7