著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Haruki Tamae and Asai Satoru and Nakagawa Kenji and Hanyu Isamu,MASCOT: Mask Pattern Correction Tool Using Genetic Algorithm.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,1996,35,12B,6374-6378,https://cir.nii.ac.jp/crid/1390001206250331264,https://doi.org/10.1143/jjap.35.6374