著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Min Jae–Sik and Son Young–Woong and Kang Won–Gu and Chun Soung–Soon and Kang Sang–Won,Atomic Layer Deposition of TiN Films by Alternate Supply of Tetrakis(ethylmethylamino)-Titanium and Ammonia.,Japanese Journal of Applied Physics,0021-4922,The Japan Society of Applied Physics,1998,37,9A,4999-5004,https://cir.nii.ac.jp/crid/1390001206250432128,https://doi.org/10.1143/jjap.37.4999