Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kim Eunah and Moon Seong-yong and Kim Yong-hoon and Yoon Hee-sun and No Kwangsoo,Simulation of Optical Constants Range of High-Transmittance Attenuated Phase-Shifting Masks Used in KrF Laser and ArF Laser.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2000,39,11,6321-6328,https://cir.nii.ac.jp/crid/1390001206251545728,https://doi.org/10.1143/jjap.39.6321