著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Park Jin-Goo and Lee Sang-Ho and Kim Sang-Yong,Particle Removal and Its Mechanism on Hydrophobic Silicon Wafer in Highly Diluted NH4OH Solutions with an Added Surfactant,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2001,40,11,6182-6186,https://cir.nii.ac.jp/crid/1390001206251595264,https://doi.org/10.1143/jjap.40.6182