Effect of Nonstoichiometry on Microstructure of Epitaxially Grown BaTiO3 Thin Films.

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  • Nishi Yuji
    Taiyo Yuden Co., Ltd., 5607-2 Nakamuroda, Haruna-machi, Gunma 370-3347, Japan
  • Fujimoto Masayuki
    Taiyo Yuden Co., Ltd., 5607-2 Nakamuroda, Haruna-machi, Gunma 370-3347, Japan
  • Suzuki Toshimasa
    Taiyo Yuden Co., Ltd., 5607-2 Nakamuroda, Haruna-machi, Gunma 370-3347, Japan

Bibliographic Information

Other Title
  • Effect of Nonstoichiometry on Microstructure of Epitaxially Grown BaTiO<sub>3</sub> Thin Films
Published
2000
DOI
  • 10.1143/jjap.39.5970
Publisher
The Japan Society of Applied Physics

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Description

The microstructural features over a wide range of cation nonstoichiometry in barium titanate thin films grown on (100) SrTiO3 substrates by pulsed laser deposition were investigated by X-ray diffraction and transmission electron microscopy. Well-crystallized perovskite barium titanate was heteroepitaxially grown even with 20% excess titanium, but the film contained column-like amorphous secondary phases and some planar defects. In the case of 50% excess titanium, the film consisted of columnar nanocrystallites epitaxially grown on the substrate and a surrounding titanium-rich amorphous matrix. The incorporation of 50% excess barium, on the other hand, significantly degraded film crystallinity due to the formation of nanometer-scale amorphous phases.

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