Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Lim Hyun Seok and Kang Sang Bom and Jeon In Sang and Choi Gil Heyun and Park Young Wook and Lee Sang In and Moon Joo Tae,Atomic Layer Deposition- and Chemical Vapor Deposition-TiN Top Electrode Optimization for the Reliability of Ta2O5 and Al2O3 Metal Insulator Silicon Capacitor for 0.13.MU.m Technology and Beyond.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2001,40,4B,2669-2673,https://cir.nii.ac.jp/crid/1390001206253413376,https://doi.org/10.1143/jjap.40.2669