著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Ahn Seong-Deok and Lee Hyun-Bae and Kang Sang-Won,Surface Morphology Improvement of Metalorganic Chemical Vapor Deposition Al Films by Layered Deposition of Al and Ultrathin TiN.,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2000,39,6A,3349-3354,https://cir.nii.ac.jp/crid/1390001206253719552,https://doi.org/10.1143/jjap.39.3349