著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yamamoto Kazuhiko and Hayashi Shigenori and Niwa Masaaki and Asai Masayuki and Horii Sadayoshi and Miya Hironobu,Impact of Hf Metal Predeposition on the Properties of HfO<sub>2</sub>Grown by Physical and Chemical Vapor Deposition,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2003,42,4B,1835-1839,https://cir.nii.ac.jp/crid/1390001206256035840,https://doi.org/10.1143/jjap.42.1835