{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390001206256257536.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.1143/jjap.42.223"}},{"identifier":{"@type":"NDL_BIB_ID","@value":"6441266"}},{"identifier":{"@type":"URI","@value":"http://id.ndl.go.jp/bib/6441266"}},{"identifier":{"@type":"URI","@value":"https://ndlsearch.ndl.go.jp/books/R000000004-I6441266"}},{"identifier":{"@type":"URI","@value":"http://stacks.iop.org/1347-4065/42/i=1R/a=223/pdf"}},{"identifier":{"@type":"NAID","@value":"210000053277"}},{"identifier":{"@type":"NAID","@value":"30021839893"}},{"identifier":{"@type":"NAID","@value":"10010795433"}}],"dc:title":[{"@language":"en","@value":"Electrical and Optical Properties of In2O3-ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering."},{"@value":"Electrical and Optical Properties of In<sub>2</sub>O<sub>3</sub>–ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering"}],"dc:language":"en","description":[{"type":"abstract","notation":[{"@language":"en","@value":"Using a In<SUB>2</SUB>O<SUB>3</SUB> and ZnO powder mixture with a ratio of 95:5 in wt% as a target, highly transparent conducting oxide (TCO) films are prepared on polyethylene terephthalate (PET) substrates by rf-magnetron sputtering. These films have amorphous structures with excellent electrical stability, surface uniformity and adhesion to the PET substrate and can be prepared at room temperature. In particular, In<SUB>2</SUB>O<SUB>3</SUB>–ZnO (IZO) films directly deposited on PET without a hard-coated layer have nearly similar electrical properties, higher transmittance and a more uniform surface in comparison with those deposited on a hard-coated layer of PET. When a TCO material is deposited on PET, IZO is more suitable than indium tin oxide (ITO) in several aspects such as the optical, electrical, and etching properties and its surface uniformity."}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1410001206256257537","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000401715261"},{"@type":"NRID","@value":"9000107348595"}],"foaf:name":[{"@language":"en","@value":"Kim Hwa-Min"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Department of Physics and Semiconductor Science, Catholic University of Daegu"},{"@language":"en","@value":"The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)"}]},{"@id":"https://cir.nii.ac.jp/crid/1410001206256257536","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000401715262"},{"@type":"NRID","@value":"9000107348596"}],"foaf:name":[{"@language":"en","@value":"Jung Sang-Kuan"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Department of Physics and Semiconductor Science, Catholic University of Daegu"}]},{"@id":"https://cir.nii.ac.jp/crid/1410001206256257538","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000401715263"},{"@type":"NRID","@value":"9000107348597"}],"foaf:name":[{"@language":"en","@value":"Ahn Jeung-Sun"}],"jpcoar:affiliationName":[{"@language":"en","@value":"The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)"}]},{"@id":"https://cir.nii.ac.jp/crid/1410001206256257539","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000401715264"},{"@type":"NRID","@value":"9000107348598"}],"foaf:name":[{"@language":"en","@value":"Kang Young-Jin"}],"jpcoar:affiliationName":[{"@language":"en","@value":"The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)"}]},{"@id":"https://cir.nii.ac.jp/crid/1410001206256257540","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000401715265"},{"@type":"NRID","@value":"9000107348599"}],"foaf:name":[{"@language":"en","@value":"Je Koo-Chul"}],"jpcoar:affiliationName":[{"@language":"en","@value":"The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)"}]}],"publication":{"publicationIdentifier":[{"@type":"PISSN","@value":"00214922"},{"@type":"EISSN","@value":"13474065"},{"@type":"NDL_BIB_ID","@value":"000000159719"},{"@type":"ISSN","@value":"00214922"},{"@type":"LISSN","@value":"00214922"},{"@type":"NCID","@value":"AA10457675"}],"prism:publicationName":[{"@language":"en","@value":"Japanese Journal of Applied Physics"},{"@language":"en","@value":"JPN. J. APPL. PHYS."},{"@language":"en","@value":"JJAP"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society of Applied Physics"}],"prism:publicationDate":"2003","prism:volume":"42","prism:number":"1","prism:startingPage":"223","prism:endingPage":"227"},"reviewed":"false","url":[{"@id":"http://id.ndl.go.jp/bib/6441266"},{"@id":"https://ndlsearch.ndl.go.jp/books/R000000004-I6441266"},{"@id":"http://stacks.iop.org/1347-4065/42/i=1R/a=223/pdf"}],"availableAt":"2003","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=TCO","dc:title":"TCO"},{"@id":"https://cir.nii.ac.jp/all?q=IZO%20and%20ITO%20films","dc:title":"IZO and ITO films"},{"@id":"https://cir.nii.ac.jp/all?q=rf-magnetron%20sputtering","dc:title":"rf-magnetron sputtering"},{"@id":"https://cir.nii.ac.jp/all?q=PET%20substrate","dc:title":"PET substrate"},{"@id":"https://cir.nii.ac.jp/all?q=the%20AFM%20images","dc:title":"the AFM images"},{"@id":"https://cir.nii.ac.jp/all?q=surface%20uniformity","dc:title":"surface uniformity"}],"relatedProduct":[{"@id":"https://cir.nii.ac.jp/crid/1360003446857319168","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@value":"Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp"}]},{"@id":"https://cir.nii.ac.jp/crid/1360011144838647168","@type":"Article","relationType":["cites"],"jpcoar:relatedTitle":[{"@value":"Transparent and conductive multicomponent oxide films prepared by magnetron sputtering"}]},{"@id":"https://cir.nii.ac.jp/crid/1360566396805526400","@type":"Article","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@value":"Electrical, Optical and Material Properties of ZnO-Doped Indium–Tin Oxide Films Prepared Using Radio Frequency Magnetron Cosputtering System at Room 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