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A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry
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- An Ilsin
- Department of Physics, Hanyang University
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- Bang Kyoung-Yoon
- Department of Physics, Hanyang University
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- Kim Ok-Kyung
- Department of Physics, Hanyang University
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- Lee Jaeho
- Department of Physics, Hanyang University
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- Oh Hye-Keun
- Department of Physics, Hanyang University
Bibliographic Information
- Other Title
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- Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry
- Published
- 2003
- DOI
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- 10.1143/jjap.42.2872
- Publisher
- The Japan Society of Applied Physics
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Description
A rotating compensator type spectroscopic ellipsometry (RCSE) equipped with a multichannel detector was developed. For accurate data reduction, the azimuth of each optical element should be determined with respect to the plane of incidence. In this paper, we present a spectroscopic single-zone phase calibration method for RCSE utilizing multichannel measurements. With this method, the azimuth of the polarizer could be determined as accurately as in the two-zone phase method, but the time required for calibration process was reduced by half.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 42 (5A), 2872-2875, 2003
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390001206256443264
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- NII Article ID
- 130004530852
- 10010716633
- 210000053434
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 6530980
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL Search
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
