著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sato Shin’ya and Mizushima Ichiro and Miyano Kiyotaka and Sato Tsutomu and Nakamura Shin’ichi and Tsunashima Yoshitaka and Arikado Tsunetoshi and Uchitomi Naotaka,Defects Induced by Carbon Contamination in Low-Temperature Epitaxial Silicon Films Grown with Monosilane,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2005,44,3,1169-1173,https://cir.nii.ac.jp/crid/1390001206263684480,https://doi.org/10.1143/jjap.44.1169