著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Hashiguchi Hiroyuki and Egashira Yoshiya and Furukawa Hiroyuki and Endo Taishi and Kosaka Tetsuya and Kosaka Koji and Uozumi Kiyohiko and Watanabe Masayuki and Yamakawa Takahiro and Miyata Noboru and Nakada Akira and Kubota Hiroshi and Ohmi Tadahiro,Highly Reliable Piezoelectric Actuator for Precision Stage System,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2005,44,5A,3307-3312,https://cir.nii.ac.jp/crid/1390001206263910912,https://doi.org/10.1143/jjap.44.3307