著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yamazoe Kenji and Saitoh Kenji and Suzuki Akiyoshi,An Innovative Method for Contact Hole Printing with Binary Mask and Single Exposure,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2004,43,6B,3653-3662,https://cir.nii.ac.jp/crid/1390001206264106624,https://doi.org/10.1143/jjap.43.3653