著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Nakai Katsuhiko and Kitahara Koichi and Ohta Yasumitsu and Ikari Atsushi and Tanaka Masahiro,Crystal Defects in Epitaxial Layer on Nitrogen-doped Czochralski-grown Silicon Substrate(2)Suppression of the Crystal Defects in Epitaxial Layer by the Control of Crystal Growth Condition and Carbon Co-doping,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2004,43,4A,1247-1253,https://cir.nii.ac.jp/crid/1390001206265146240,https://doi.org/10.1143/jjap.43.1247