著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yan Fawang and Tsukihara Masashi and Nakamura Akihiro and Yadani Takayuki and Fukumoto Tetsuya and Naoi Yoshiki and Sakai Shiro,Surface Smoothing Mechanism of AlN Film by Initially Alternating Supply of Ammonia,Japanese Journal of Applied Physics,00214922,The Japan Society of Applied Physics,2004,43,8B,L1057-L1059,https://cir.nii.ac.jp/crid/1390001206266378240,https://doi.org/10.1143/jjap.43.l1057