光誘起電流による半導体／金属界面の真実接触面の評価の基礎研究

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タイトル別名
  • Photo-Induced Current between Semiconductor and Metal through Real Contact Area.
  • ヒカリ ユウキ デンリュウ ニ ヨル ハンドウタイ キンゾク カイメン ノ シンジツ セッショクメン ノ ヒョウカ ノ キソ ケンキュウ

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説明

Real contact area between semiconductor and metal is studied by measuring photo induced current (PIC), which is stimulated by laser at the semiconductor surface. Transmittance of PIC from semiconductor to metal interface is discussed. PIC increases proportionally with the increase of normal force between the solids, which implies adhesion like phenomena at the interface. Since PIC is strongly depended on the position of the incidence of light, PIC images, which were obtained with scanning of laser, express the distributions of the real contact area. PIC can be a new method to estimate the interface properties.

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