Temperature Measurements by Using MEMS(<Special Issue>The 1st Symposium on Micro-Nano Engineering)

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  • MIYAZAKI Koji
    Department of Mechanical and Control Engineering, Kyushu Institute of Technology

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  • MEMSを利用した温度測定(<小特集>第1回マイクロ・ナノ工学シンポジウム)
  • MEMSを利用した温度測定
  • MEMS オ リヨウ シタ オンド ソクテイ

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We used metal thin films prepared by a simple MEMS technique for temperature measurements. We calibrated the decreased thermoelectric power of metal thin film thermocouples (TFTCs), and used those for measurements of temperature distribution at microscopic area. We applied the TFTCs to the Scanning Thermal Microscope (SThM) for developments of temperature measurements. We used metal thin film for thermal conductivity measurements of thin films as both a micro-heater and a temperature sensor called 3ω method. The mechanisms of thermal conductivity reduction of nano-structured materials can be discussed through thermal conductivity measurements at low temperature.

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