Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
TAKAHASHI Masato and WAKUI Shinji and MAKINOUCHI Susumu,Performance Improvement of Semiconductor Lithograph Machine Using Active Mass Damper System(Mechanical Systems),TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C,03875024,The Japan Society of Mechanical Engineers,2010,76,772,3350-3356,https://cir.nii.ac.jp/crid/1390001206388273280,https://doi.org/10.1299/kikaic.76.3350