Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) TAKAKUWA Yuji and ISHIDA Fumiaki,Real-time Monitoring of Si Thermal Oxidation by Auger Electron Spectroscopy Combined with Reflection High-Energy Electron Diffraction.,Hyomen Kagaku,03885321,The Surface Science Society of Japan,2001,22,8,483-491,https://cir.nii.ac.jp/crid/1390001206454803328,https://doi.org/10.1380/jsssj.22.483