Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Nitta Shoji,Application of Plasma Processes to Amorphous Semiconductors,Kakuyūgō kenkyū,04512375,The Japan Society of Plasma Science and Nuclear Fusion Research,1987,57,4,215-222,https://cir.nii.ac.jp/crid/1390001206512401792,https://doi.org/10.1585/jspf1958.57.215