Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
TOSHIYOSHI Hiroshi,Mechanism and Performance Limit of Electrostatic Microactuators,Journal of The Society of Instrument and Control Engineers,04534662,The Society of Instrument and Control Engineers,2003,42,1,18-23,https://cir.nii.ac.jp/crid/1390001206516715648,https://doi.org/10.11499/sicejl1962.42.18