Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) SOKABE Takashi and HOSAKA Hirosi and ITAO Kiyosi,Coupled Vtbration of Micro-canti1ever Array,Micromechatronics,13438565,The Horological Institute of Japan,1999,43,1,67-75,https://cir.nii.ac.jp/crid/1390001206572355840,https://doi.org/10.20805/micromechatronics.43.1_67