Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
ISHII Kiyoshi,Vacuum evaporation and sputtering: introduction to thin film preparation,Oyo Buturi,03698009,The Japan Society of Applied Physics,2011-07-10,80,7,626-630,https://cir.nii.ac.jp/crid/1390001277358994432,https://doi.org/10.11470/oubutsu.80.7_626