Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) HORIUCHI Tsutomu and HAYASHI Katsuyoshi,Development of biodevices using microfabrication techniques,Oyo Buturi,03698009,The Japan Society of Applied Physics,2005-03-10,74,3,366-370,https://cir.nii.ac.jp/crid/1390001277360555136,https://doi.org/10.11470/oubutsu.74.3_366