Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) ESASHI Masayoshi,OC01 Micromachine and Nanomachine,Proceedings of Symposium on Ultrasonic Electronics,2433-1414,Institute for Ultrasonic Elecronics,2000-11-06,21,0,23-28,https://cir.nii.ac.jp/crid/1390001288091541376,https://doi.org/10.24492/iuse.21.0_23