Fabrication and Characterization of an Arrayed Shape Memory Alloy Thick Film Actuator Device for Planar Tactile Displays
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- Yanatori Hiroshi
- Graduate School of Science and Engineering, Yamagata University
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- Tsuji Kazuki
- Graduate School of Science and Engineering, Yamagata University
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- Abe Konomu
- Advanced Development Dept., R&D Center, Tokai Rika CO., LTD.
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- Iwasaki Kenji
- Advanced Development Dept., R&D Center, Tokai Rika CO., LTD.
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- Mineta Takashi
- Graduate School of Science and Engineering, Yamagata University
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<p>This paper describes the fabrication and characterization of a shape memory alloy (SMA) thick film actuator array for MEMS-type tactile displays that present information to a human finger with mechanical stimulation. A planar SMA thick film actuator array (5×5 array, 1 mm pitch) is proposed as a core component of tactile displays. A prototype of the MEMS-type SMA actuator array device with planar meandering SMA actuators and Pt thin film micro-heaters was successfully fabricated from a 10 µm thick SMA flash-evaporated film through a novel fabrication processes. The basic force generation properties of the completed SMA actuator were evaluated by heating the Pt micro-heater. When the device initially deflected to 100 µm, it was able to generate 33 mN and 16 mN of force by heating with 15 mA of DC current and without heating, respectively. In the combination with a bias spring, reversible force generation and displacement were estimated to be 5 mN and 20 µm when driven with a DC current, respectively. The force generated by the SMA actuator during vibrational motion at 20-40 Hz decreased to half the force generated during static motion. However, the output force was expected to be large enough to mechanically stimulate a human finger at 20-40 Hz.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 139 (1), 15-20, 2019-01-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001288104964352
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- NII論文ID
- 130007542063
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 029439446
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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