{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390001288125302016.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.11522/pscjspe.2018a.0_447"}},{"identifier":{"@type":"NAID","@value":"130007602158"}}],"dc:title":[{"@language":"ja","@value":"コンパクト構造磁気浮上ナノ位置決めステージの開発"},{"@language":"en","@value":"Development of Compact Maglev Nanometer-Scale Positioning Stage"}],"dc:language":"ja","description":[{"type":"abstract","notation":[{"@language":"ja","@value":"<p>超精密位置決めステージには、テーブルを非接触に6自由度制御する磁気浮上案内の適用が有効である。しかし、テーブルの自重をリニアモータ推力で支持する場合、コイル発熱の処理やモータの大形化が課題となる。そこで、本研究では、永久磁石の反発力を利用した非接触重力補償要素を用いたコンパクトな磁気浮上ステージ機構を開発した。さらに、特性評価の結果、ナノメートルスケールの浮上安定性を確認した。</p>"}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1410572174255760388","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000399783644"}],"foaf:name":[{"@language":"ja","@value":"高橋 宗大"},{"@language":"en","@value":"Takahashi Motohiro"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Hitach, LTD."},{"@language":"ja","@value":"日立製作所　研究開発グループ"}]},{"@id":"https://cir.nii.ac.jp/crid/1410572174255760384","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000399783645"}],"foaf:name":[{"@language":"ja","@value":"加藤 孝宜"},{"@language":"en","@value":"Kato Takanori"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Hitach, 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