Thermal history-induced variation of the crystallinity and residual stress of electroplated gold thin films
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- NAKAUCHI Genta
- Tohoku Univ.
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- SUZUKI Ken
- Tohoku Univ.
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- MIURA Hideo
- Tohoku Univ.
Bibliographic Information
- Other Title
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- めっき金薄膜品質と残留応力の熱履歴依存性
Journal
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- The Proceedings of Autumn Conference of Tohoku Branch
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The Proceedings of Autumn Conference of Tohoku Branch 2018.54 (0), 307-, 2018
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390001288140457856
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- NII Article ID
- 130007620312
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- ISSN
- 24242721
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles