Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) MATSUO Shigeki and ENJO Kei and HASHIMOTO Shuichi,Heating Effect of Etchant on Femtosecond Laser-Assisted Etching,The Review of Laser Engineering,03870200,The Laser Society of Japan,2013,41,10,827,https://cir.nii.ac.jp/crid/1390004222614122368,https://doi.org/10.2184/lsj.41.10_827