Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Miyaguchi Takashi and Kanno Akihiro and Kobayashi Yasunori and Yamada Toshihiro and Sato Takeshi,Fabrication of Metal Agglomeration Masks for Making Subwavelength Structure,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2021-03-03,2021S,0,773-774,https://cir.nii.ac.jp/crid/1390007779708042752,https://doi.org/10.11522/pscjspe.2021s.0_773