[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Scribing of Ceramie Circuit Board with Q-Switched Nd:YAG Laser

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Abstract

Scribing of copper coated alumina ceramic board with Q-switched YAG laser used for the maskless direct patterning of circuit board is experimentally investigated, which leads to efficient production of trial circuit board. Better dividing of alumina circuit board 655μm in thickness can be attained by the scribing of about 100μm depth. Higher repetition frequency of laser irradiation leads to smaller notch angle and lower breaking load.

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