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Product design of silicon wafer for advanced CMOS image sensors-Control of SiO<sub>2</sub>/Si interface states by hydrocarbon molecular ion implantation-
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- Masada Ayumi
- SUMCO
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- Suzuki Akihiro
- SUMCO
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- Kobayashi Koji
- SUMCO
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- Shigematsu Satoshi
- SUMCO
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- Okuyama Ryosuke
- SUMCO
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- Koga Yoshihiro
- SUMCO
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- Hirose Ryo
- SUMCO
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- Kurita Kazunari
- SUMCO
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- Kadono Takeshi
- SUMCO
Bibliographic Information
- Other Title
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- 高感度CMOSイメージセンサ向けシリコンウェーハの製品設計 -炭化水素分子イオン注入によるSiO<sub>2</sub>/Si界面準位の制御-
- Published
- 2020-02-28
- DOI
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- 10.11470/jsapmeeting.2020.1.0_2588
- Publisher
- The Japan Society of Applied Physics
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 2588-2588, 2020-02-28
The Japan Society of Applied Physics
- Tweet
Keywords
Details 詳細情報について
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- CRID
- 1390010765206680320
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
