{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390010765206680320.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.11470/jsapmeeting.2020.1.0_2588"}}],"dc:title":[{"@language":"en","@value":"Product design of silicon wafer for advanced CMOS image sensors-Control of SiO<sub>2</sub>/Si interface states by hydrocarbon molecular ion implantation-"},{"@language":"ja","@value":"高感度CMOSイメージセンサ向けシリコンウェーハの製品設計 -炭化水素分子イオン注入によるSiO<sub>2</sub>/Si界面準位の制御-"}],"dc:language":"ja","creator":[{"@id":"https://cir.nii.ac.jp/crid/1410010765206680322","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Masada Ayumi"},{"@language":"ja","@value":"柾田 亜由美"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680321","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Suzuki Akihiro"},{"@language":"ja","@value":"鈴木 陽洋"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680449","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kobayashi Koji"},{"@language":"ja","@value":"小林 弘治"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680452","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Shigematsu Satoshi"},{"@language":"ja","@value":"重松 理史"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680448","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Okuyama Ryosuke"},{"@language":"ja","@value":"奥山 亮輔"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680320","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Koga Yoshihiro"},{"@language":"ja","@value":"古賀 祥泰"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680450","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Hirose Ryo"},{"@language":"ja","@value":"廣瀬 諒"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680451","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kurita Kazunari"},{"@language":"ja","@value":"栗田 一成"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410010765206680453","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kadono Takeshi"},{"@language":"ja","@value":"門野 武"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]}],"publication":{"publicationIdentifier":[{"@type":"EISSN","@value":"24367613"}],"prism:publicationName":[{"@language":"en","@value":"JSAP Annual Meetings Extended Abstracts"},{"@language":"ja","@value":"応用物理学会学術講演会講演予稿集"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society of Applied Physics"},{"@language":"ja","@value":"公益社団法人 応用物理学会"}],"prism:publicationDate":"2020-02-28","prism:volume":"2020.1","prism:number":"0","prism:startingPage":"2588","prism:endingPage":"2588"},"jpcoar:conferenceName":"応用物理学会春季学術講演会","jpcoar:conferencePlace":"上智大学 四谷キャンパス","availableAt":"2020-02-28","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=12a-A202-6","dc:title":"12a-A202-6"},{"@id":"https://cir.nii.ac.jp/all?q=hydrogen","dc:title":"hydrogen"},{"@id":"https://cir.nii.ac.jp/all?q=interface%20state","dc:title":"interface state"},{"@id":"https://cir.nii.ac.jp/all?q=12a-A202-6","dc:title":"12a-A202-6"},{"@id":"https://cir.nii.ac.jp/all?q=%E5%8D%8A%E5%B0%8E%E4%BD%93","dc:title":"半導体"},{"@id":"https://cir.nii.ac.jp/all?q=Si%E7%B3%BB%E5%9F%BA%E7%A4%8E%E7%89%A9%E6%80%A7%E3%83%BB%E8%A1%A8%E9%9D%A2%E7%95%8C%E9%9D%A2%E3%83%BB%E3%82%B7%E3%83%9F%E3%83%A5%E3%83%AC%E3%83%BC%E3%82%B7%E3%83%A7%E3%83%B3","dc:title":"Si系基礎物性・表面界面・シミュレーション"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%95%8C%E9%9D%A2","dc:title":"界面"},{"@id":"https://cir.nii.ac.jp/all?q=%E6%B0%B4%E7%B4%A0","dc:title":"水素"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%95%8C%E9%9D%A2%E6%BA%96%E4%BD%8D","dc:title":"界面準位"}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:2009347989"}]}