Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yamaguchi Shinji and Kobayashi Kiyoteru,Paramagnetic point defects in silicon nitride films annealed at 1050℃(Ⅱ),JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2018-09-05,2018.2,0,2837-2837,https://cir.nii.ac.jp/crid/1390011959361412480,https://doi.org/10.11470/jsapmeeting.2018.2.0_2837