Irradiation Effect on Transition Metal Thin Film by Liquid Cluster Ion Beam
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- Shimizu Yuki
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
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- Shimizu Daiki
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
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- Takeuchi Mitsuaki
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
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- Ryuto Hiromichi
- Photonics and Electronics Science and Engineering Center, Kyoto Univ.
Bibliographic Information
- Other Title
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- 液体クラスターイオンビームの遷移金属薄膜への照射効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.1 (0), 1670-1670, 2017-03-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390012711637106048
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC