Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Shimizu Yuki and Yanagitani Takahiko,3Pb3-2 Mechanical Q factor dependence on Zr / Ti ratio of sputter-grown PZT epitaxial thin films,Proceedings of Symposium on Ultrasonic Electronics,1348-8236,Institute for Ultrasonic Elecronics,2022-11-07,43,0,437,https://cir.nii.ac.jp/crid/1390013507952536960,https://doi.org/10.24492/use.43.0_3pb3-2