Effect of applying substrate bias for ion-beam-assisted MBE growth of c-BN thin films
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- Hirama Kazuyuki
- NTT BRL
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- Taniyasu Yoshitaka
- NTT BRL
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- Yamamoto Hideki
- NTT BRL
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- Kumakura Kazuhide
- NTT BRL
Bibliographic Information
- Other Title
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- c-BN薄膜のイオンビームアシストMBE成長における基板へのバイアス電圧印加の効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2016.1 (0), 3431-3431, 2016-03-03
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390013972158513664
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC