著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Nakano Takeo and Kimura Kosuke and Iijima Yuto and Takeuchi Masato and Oya Kei and Nagao Masayoshi and Ohsaki Hisashi,Linear Relationship between Reactive Gas Flow Rate and Target Power at Mode Transitions in Reactive Sputtering,e-Journal of Surface Science and Nanotechnology,1348-0391,公益社団法人 日本表面真空学会,2024-04-04,advpub,0,,https://cir.nii.ac.jp/crid/1390018218937535872,https://doi.org/10.1380/ejssnt.2024-013