著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Suzuki Kenta and Ueda Tetsuya and Hiroshima Hiroshi and Hayashi Yoshihiro and Ishida Masaki and Funayoshi Tomomi and Hiura Hiromi and Hasegawa Noriyasu and Yamamoto Kiyohito,Feature-size Control by Pattern Transfer Etching in Nanoimprint Lithography for Half-pitch 24 nm Damascene Interconnect,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2024-06-25,37,5,449-456,https://cir.nii.ac.jp/crid/1390019523885855360,https://doi.org/10.2494/photopolymer.37.449