Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
HARAGUCHI Takayuki and NISHIKAWA Masaaki and UEDA Yoshihiko and OGAWA Soichi,Preparations of ITO Thin Films by Low Temperature and Low Damage Process,Shinku,05598516,The Vacuum Society of Japan,2004,47,3,187-190,https://cir.nii.ac.jp/crid/1390282679039929600,https://doi.org/10.3131/jvsj.47.187