Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
OHIWA Tsunemi and OKAMOTO Takayuki and TAKIGUCHI Katsumi and OGAWA Sochi and YOSHITAKE Masaaki,Ta2O5 thin films preparation of reactive neutral beam sputter. Study on effects of N2 gas.,Shinku,05598516,The Vacuum Society of Japan,1987,30,5,504-507,https://cir.nii.ac.jp/crid/1390282679039981952,https://doi.org/10.3131/jvsj.30.504