Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
BANNO Tatsuya and TSUZUKI Kazuhiro and KINBARA Akira and NAKAGAWA Yukito and TSUKADA Tsutomu,Studies of the Distribution of the Self-Bias Potential on an RF Electrode in Plasma.,Shinku,05598516,The Vacuum Society of Japan,1994,37,8,621-628,https://cir.nii.ac.jp/crid/1390282679039995392,https://doi.org/10.3131/jvsj.37.621