Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KATOH Masaaki and TAKAHASHI Akiko and MIYASHITA Kiyoshi and OHTE Takeo and OHTANI Sugio and KOJIMA Akira,Analysis of the Plasma Surface Modification Mechanism by Using the Plasma Diagnosis.,Shinku,05598516,The Vacuum Society of Japan,1997,40,5,442-445,https://cir.nii.ac.jp/crid/1390282679040119808,https://doi.org/10.3131/jvsj.40.442